Edgewall Software
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Opened 17 years ago

Closed 17 years ago

#6961 closed defect (invalid)

Heated solvent tank doesn't drain completely

Reported by: zhang Owned by: Jonas Borgström
Priority: lowest Milestone:
Component: general Version:
Severity: normal Keywords:
Cc: Branch:
Release Notes:
API Changes:
Internal Changes:

Description

SPX photoresist stripper (consists of 70% MEA and 30% of DIMSO) doesn't drain completely in the heated solvent bench in LCD Lab. SPX appears very sticky and doesn't flow. I need pour in new SPX stripper to process wafers for Tenri, Sharp.

Thanks.

Hao

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Change History (1)

comment:1 by John Hampton, 17 years ago

Priority: high → lowest
Resolution: → invalid
Status: new → closed

This is for Trac, not for whatever project you're working on. Trac is software, and as such, doesn't find much need for heated solvent tanks.

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